Growth and stability of CVD Ni3N and ALD NiO dual layers - Peeref

标题

Growth and stability of CVD Ni3N and ALD NiO dual layers

作者

关键词

-

出版物

SURFACE & COATINGS TECHNOLOGY

Volume 205, Issue 3, Pages 710-716

出版商

Elsevier BV

发表日期

2010-07-24

DOI

10.1016/j.surfcoat.2010.07.059

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