Zirconium carbonitride films deposited by combined magnetron sputtering and ion implantation (CMSII)

标题
Zirconium carbonitride films deposited by combined magnetron sputtering and ion implantation (CMSII)
作者
关键词
-
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 204, Issue 12-13, Pages 1889-1892
出版商
Elsevier BV
发表日期
2009-11-13
DOI
10.1016/j.surfcoat.2009.11.012

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