Blistering/exfoliation kinetics of GaAs by hydrogen and helium implantations

标题
Blistering/exfoliation kinetics of GaAs by hydrogen and helium implantations
作者
关键词
-
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 203, Issue 17-18, Pages 2370-2374
出版商
Elsevier BV
发表日期
2009-03-31
DOI
10.1016/j.surfcoat.2009.03.043

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