Si nanoparticle formation in SiO2 by Si ion implantation: Effect of energy and fluence on size distribution and on SiO2 composition

出版年份 2009 全文链接

标题

作者

关键词

出版物

Volume 203, Issue 17-18, Pages 2501-2505

出版商

Elsevier BV

发表日期

2009-03-04

DOI

10.1016/j.surfcoat.2009.02.061

Discuss science. Find collaborators. Network.

Join a conversation

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now