Applications of plasma-based technology to microelectronics and biomedical engineering

出版年份 2009 全文链接

标题

作者

关键词

出版物

Volume 203, Issue 17-18, Pages 2793-2798

出版商

Elsevier BV

发表日期

2009-03-10

DOI

10.1016/j.surfcoat.2009.02.131

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