Improvement of the performance of ZnO TFTs by low-temperature supercritical fluid technology treatment

标题
Improvement of the performance of ZnO TFTs by low-temperature supercritical fluid technology treatment
作者
关键词
-
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 204, Issue 6-7, Pages 1112-1115
出版商
Elsevier BV
发表日期
2009-09-27
DOI
10.1016/j.surfcoat.2009.09.050

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