Infrared and Raman Study of Amorphous Silicon Carbide Thin Films Deposited by Radiofrequency Cosputtering

Si-rich a-Si1−xCx thin films by d.c. magnetron co-sputtering of silicon and silicon carbide: Structural and optical properties

(2012) M.A. Ouadfel et al.   APPLIED SURFACE SCIENCE

The effect of neutron irradiation on the properties of SiC and SiC(N) layer prepared by plasma enhanced chemical vapor deposition

(2012) Jozef Huran et al.   APPLIED SURFACE SCIENCE

SiC coatings grown by liquid injection chemical vapor deposition using single source metal-organic precursors

(2012) G. Boisselier et al.   SURFACE & COATINGS TECHNOLOGY

Silicon nanocrystals on amorphous silicon carbide alloy thin films: Control of film properties and nanocrystals growth

(2012) Jérémy Barbé et al.   THIN SOLID FILMS

Fabrication of Si nanocrystals in an amorphous SiC matrix by magnetron sputtering

(2010) A. Gencer Imer et al.   PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES

Amorphous SixC1−x:H single layers before and after thermal annealing: Correlating optical and structural properties

(2010) Andreas M. Hartel et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Si-rich a-SiC:H thin films: Structural and optical transformations during thermal annealing

(2010) Matthias Künle et al.   THIN SOLID FILMS

Evolution of Si (and SiC) nanocrystal precipitation in SiC matrix

(2007) Dengyuan Song et al.   THIN SOLID FILMS