Deposition of nanocrystalline thin TiO2 films for MOS capacitors using Sol–Gel spin method with Pt and Al top electrodes

标题
Deposition of nanocrystalline thin TiO2 films for MOS capacitors using Sol–Gel spin method with Pt and Al top electrodes
作者
关键词
-
出版物
SOLID-STATE ELECTRONICS
Volume 76, Issue -, Pages 71-76
出版商
Elsevier BV
发表日期
2012-07-10
DOI
10.1016/j.sse.2012.04.041

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