Stabilization of Al2O3 gate oxide on plastic substrate for low temperature poly-silicon by in situ plasma treatment

标题
Stabilization of Al2O3 gate oxide on plastic substrate for low temperature poly-silicon by in situ plasma treatment
作者
关键词
-
出版物
SOLID-STATE ELECTRONICS
Volume 54, Issue 3, Pages 323-326
出版商
Elsevier BV
发表日期
2009-11-20
DOI
10.1016/j.sse.2009.10.017

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