Thorough study of the local structure of LiPON thin films to better understand the influence of a solder-reflow type thermal treatment on their performances

标题
Thorough study of the local structure of LiPON thin films to better understand the influence of a solder-reflow type thermal treatment on their performances
作者
关键词
-
出版物
SOLID STATE IONICS
Volume 206, Issue -, Pages 72-77
出版商
Elsevier BV
发表日期
2011-12-05
DOI
10.1016/j.ssi.2011.11.009

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