期刊
SOLID STATE IONICS
卷 180, 期 11-13, 页码 853-856出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.ssi.2009.02.009
关键词
alpha-BaTiO3:H films; MIM capacitors; Proton related defects
Hydrogenated barium titanate film based metal-insulator-metal (MIM) systems show high dielectric constant and have therefore been proposed as solid state supercapacitors. Hydrogen was incorporated in the dielectric layer during the low temperature deposition process. An investigation of the electrical properties has revealed that hydrogen contributes to the conduction process as mobile ionic species as well as donor trap levels. (C) 2009 Elsevier B.V. All rights reserved.
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