Fabrication of thin film silicon solar cells on plastic substrate by very high frequency PECVD

标题
Fabrication of thin film silicon solar cells on plastic substrate by very high frequency PECVD
作者
关键词
-
出版物
SOLAR ENERGY MATERIALS AND SOLAR CELLS
Volume 94, Issue 9, Pages 1534-1541
出版商
Elsevier BV
发表日期
2010-03-25
DOI
10.1016/j.solmat.2010.01.013

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