期刊
AIP ADVANCES
卷 5, 期 11, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4935789
关键词
-
资金
- Ministry of Education and Science of Russian Federation [3.757.2014/K]
Some applications of thin film transistors (TFTs) need the bottom-gate architecture and unpassivated channel backside. We propose a simple routine to fabricate indium doped ZnO-based TFT with satisfactory characteristics and acceptable stability against a bias stress in ambient room air. To this end, a channel layer of 15 nm in thickness was deposited on cold substrate by DC reactive magnetron co-sputtering of metal Zn-In target. It is demonstrated that the increase of In concentration in ZnO matrix up to 5% leads to negative threshold voltage (V-T) shift and an increase of field effect mobility (mu) and a decrease of subthreshold swing (SS). When dopant concentration reaches the upper level of 5% the best TFT parameters are achieved such as V-T = 3.6 V, mu = 15.2 cm(2)/Vs, SS = 0.5 V/dec. The TFTs operate in enhancement mode exhibiting high turn on/turn off current ratio more than 10(6). It is shown that the oxidative post-fabrication annealing at 250 degrees C in pure oxygen and next ageing in dry air for several hours provide highly stable operational characteristics under negative and positive bias stresses despite open channel backside. A possible cause of this effect is discussed. (C) 2015 Author(s).
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