Influence of hydrogen dilution on structural, electrical and optical properties of hydrogenated nanocrystalline silicon (nc-Si:H) thin films prepared by plasma enhanced chemical vapour deposition (PE-CVD)

标题
Influence of hydrogen dilution on structural, electrical and optical properties of hydrogenated nanocrystalline silicon (nc-Si:H) thin films prepared by plasma enhanced chemical vapour deposition (PE-CVD)
作者
关键词
-
出版物
SOLAR ENERGY MATERIALS AND SOLAR CELLS
Volume 92, Issue 10, Pages 1217-1223
出版商
Elsevier BV
发表日期
2008-06-12
DOI
10.1016/j.solmat.2008.04.012

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