Incorporating compliant elastomers for jumping locomotion in microrobots

Small insects and other animals use a multitude of materials to realize specific functions, including locomotion. This paper demonstrates application of the first microfabrication process to incorporate high aspect ratio compliant elastomer structures in-plane with traditional silicon microelectromechanical systems (MEMS). By incorporating these new materials, compact energy storage systems based on elastomer springs for small jumping robots have been demonstrated. Results include a 4 mm x 4 mm jumping mechanism that has reached heights of 32 cm, x 80 its own height, and an on-chip actuated mechanism that has been used to propel a 1.4 mg projectile over 7 cm.