期刊
SMART MATERIALS AND STRUCTURES
卷 19, 期 7, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0964-1726/19/7/075003
关键词
-
This paper reports the top-down fabrication of carbon nanotube (CNT) thin film on microelectrical mechanical systems (MEMS) and the characterization of the thermoelectric coefficients of aligned single-walled carbon nanotube (SWNT) forest film. The film was synthesized by water-assisted chemical vapor deposition (CVD), a process known as 'super-growth'. CNT film was then condensed, manually maneuvered, and conveniently patterned by electron beam (EB) lithography to form desirable shapes. We demonstrate this process by patterning an array of Au-CNT thermocouples; measurement under room temperature conditions reveals the Seebeck coefficient of aligned SWNT film to be 18-20 mu V C-1.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据