Low speed piezoelectric optical microscanner actuated by piezoelectric microcantilevers using LaNiO3buffered Pb(Zr,Ti)O3thin film

标题
Low speed piezoelectric optical microscanner actuated by piezoelectric microcantilevers using LaNiO3buffered Pb(Zr,Ti)O3thin film
作者
关键词
-
出版物
Smart Materials and Structures
Volume 18, Issue 6, Pages 065008
出版商
IOP Publishing
发表日期
2009-05-07
DOI
10.1088/0964-1726/18/6/065008

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