Plow and Ridge Nanofabrication

SMALL

卷 9, 期 18, 页码 3058-3062

WILEY-V C H VERLAG GMBH

atomic force microscopy; nanolithography; polymers; scanning probe microscopy; nanofabrication

Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter

1. DARPA/MTO [N66001-08-1-2044]
2. AOARD [FA2386-10-1-4065]
3. AFOSR [FA955-012-1-0280, FA9550-12-1-0141]
4. DoD/NPS/NSSEF [N00244-09-1-0012, N00244-09-1-0071]
5. Chicago Biomedical Consortium
6. Chicago Community Trust
7. CCNE initiative of NIH [U54 CA151880]
8. Northwestern University's International Institute for Nanotechnology
9. [DBI-1152139]
10. [DMB-1124131]
11. Division Of Materials Research
12. Direct For Mathematical & Physical Scien [1124131] Funding Source: National Science Foundation