期刊
SMALL
卷 10, 期 3, 页码 493-499出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/smll.201301066
关键词
sacrificial-post template; block copolymer; self-assembly; nanostructures; square lattices
类别
资金
- Semiconductor Research Corporation
- FENA Center
- NRI
- SMA
- National Science Foundation
- Tokyo Electron
- Taiwan Semiconductor Manufacturing Company
- NGS Singapore
- NSF
- Div Of Civil, Mechanical, & Manufact Inn
- Directorate For Engineering [1246740] Funding Source: National Science Foundation
A sacrificial-post templating method is presented for directing block copolymer self-assembly to form nanostructures consisting of monolayers and bilayers of microdomains. In this approach, the topographical post template is removed after self-assembly and therefore is not incorporated into the final microdomain pattern. Arrays of nanoscale holes of different shapes and symmetries, including mesh structures and perforated lamellae with a bimodal pore size distribution, are produced. The ratio of the pore sizes in the bimodal distributions can be varied via the template pitch, and agrees with predictions of self consistent field theory.
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