4.7 Article

Ultra-sensitive, One-time Use Hydrogen Sensors Based on Sub-10 nm Nanogaps on an Elastomeric Substrate

期刊

SENSORS AND ACTUATORS B-CHEMICAL
卷 178, 期 -, 页码 689-693

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2012.12.076

关键词

Nanogaps; Hydrogen gas sensors; Palladium (Pd); Polydimethylsiloxane (PDMS)

资金

  1. Priority Research Centers Program through the National Research Foundation of Korea (NRF)
  2. Ministry of Education, Science and Technology [2009-0093823]
  3. Converging Research Center Program through the Ministry of Education, Science, and Technology [2010K001430]

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Extremely narrow nanogaps with a width less than 10 nm have been achieved in Pd thin films on a PDMS substrate by the combination of tensile straining and fine control of initial hydrogen concentration. For the Pd/PDMS structures pre-elongated by 25%, the width of nanogaps was found to decrease with decreasing concentration of the initial feed of hydrogen gas. Hydrogen sensors based on the nanogaps with reduced widths resulted in a dramatic improvement in hydrogen detection limit, and the minimum detection limit obtained in this study was 10 ppm, which is the lowest ever reported for hydrogen sensors employing only a Pd thin film. These results provide an unusual opportunity to use these sensors in specific fields, where ultra-high precision hydrogen detection is required even with one-time use. (c) 2012 Elsevier B.V. All rights reserved.

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