期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 156, 期 2, 页码 906-911出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2011.03.004
关键词
CuO nanowires; Humidity sensor; Glass substrate
资金
- Center for Frontier Materials and Micro/Nano Science and Technology, National Cheng Kung University (NCKU), Taiwan
- Ministry of Education, Taiwan
- Bureau of Energy, Ministry of Economic Affairs of Taiwan [98-D0204-6]
The authors report the growth of CuO nanowires (NWs) on glass substrate and the fabrication of CuO NW humidity sensors. It was found that average length of the CuO NWs increased from 0.4 mu m to 2.8 and 6 mu m, respectively, as we increased the initial copper film thickness from 0.5 mu m to 1 and 2 mu m after oxidation. It was also found that resistance of the CuO NWs increased as we increased the relative humidity due to the p-type nature of CuO. Furthermore, it was found that samples with a larger initial copper film thickness and thus a longer average CuO NW length could provide a larger sensor response. (C) 2011 Elsevier B.V. All rights reserved.
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