4.7 Article

Flame aerosol reactor synthesis of nanostructured SnO2 thin films High gas-sensing properties by control of morphology

期刊

SENSORS AND ACTUATORS B-CHEMICAL
卷 150, 期 2, 页码 609-615

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2010.08.032

关键词

Metal oxide; Semiconductor; Thin film deposition; Spray

资金

  1. Washington University in St Louis
  2. China Government

向作者/读者索取更多资源

Tin dioxide (SnO2) thin films were deposited on commercial alumina chips using a flame aerosol reactor (FLAK) system The morphology of the thin films was controlled by changing various parameters such as precursor concentration burner-substrate distance and deposition time Three typical morphologies of the thin films were achieved le columnar column-granular and granular structures The as-prepared thin films with columnar structures demonstrated Improved sensing performance to ethanol vapor due to their preferred orientation single crystal phase and unique morphology (C) 2010 Elsevier B V All rights reserved

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