期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 214, 期 -, 页码 15-19出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2014.04.007
关键词
pH sensing; Ruthenium oxide electrodes; Water quality monitoring; Lab-on-a-chip
资金
- Edith Cowan University, Australia
- Department of Industry, Innovation, Science, Research and Tertiary Education, Australian Government [CRN 2011:05]
A miniaturised pH sensor structure employing an R.F. sputtered ruthenium oxide sensing thin-film electrode in conjunction with an electroplated Ag/AgCl reference electrode is developed and the effect of the thickness of the sensing electrode on the measurement accuracy is investigated. Experimental results show that the pH sensor exhibits Nernstian slopes of 66.52 mV/pH, 68.63 mV/pH, 67.73 mV/pH, and 54.83 mV/pH for ruthenium oxide film thicknesses of 425, 300, 175 and 50 nm, respectively. All the pH measurements were carried out at a temperature of 22 degrees C. The performance and characterisation of the pH sensors in terms of sensitivity, response time, pH resolution, stability and reversibility are discussed. (C) 2014 Elsevier B.V. All rights reserved.
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