Development of highly-sensitive and ultra-thin silicon stress sensor chips for wearable biomedical applications

标题
Development of highly-sensitive and ultra-thin silicon stress sensor chips for wearable biomedical applications
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 216, Issue -, Pages 158-166
出版商
Elsevier BV
发表日期
2014-05-28
DOI
10.1016/j.sna.2014.05.018

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