A high precision SOI MEMS–CMOS ±4g piezoresistive accelerometer

标题
A high precision SOI MEMS–CMOS ±4g piezoresistive accelerometer
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 210, Issue -, Pages 77-85
出版商
Elsevier BV
发表日期
2014-02-05
DOI
10.1016/j.sna.2014.01.036

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