An electrostatic field sensor operated by self-excited vibration of MEMS-based self-sensitive piezoelectric microcantilevers

标题
An electrostatic field sensor operated by self-excited vibration of MEMS-based self-sensitive piezoelectric microcantilevers
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 198, Issue -, Pages 87-90
出版商
Elsevier BV
发表日期
2013-04-19
DOI
10.1016/j.sna.2013.04.016

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