Effects of composition and thermal annealing on the mechanical properties of silicon oxycarbide films

出版年份 2012 全文链接

标题

Effects of composition and thermal annealing on the mechanical properties of silicon oxycarbide films

作者

关键词

-

出版物

SENSORS AND ACTUATORS A-PHYSICAL

Volume 176, Issue -, Pages 90-98

出版商

Elsevier BV

发表日期

2012-01-29

DOI

10.1016/j.sna.2012.01.002

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