Highly efficient piezoelectric micro harvester for low level of acceleration fabricated with a CMOS compatible process

出版年份 2012 全文链接

标题

Highly efficient piezoelectric micro harvester for low level of acceleration fabricated with a CMOS compatible process

作者

关键词

-

出版物

SENSORS AND ACTUATORS A-PHYSICAL

Volume 188, Issue -, Pages 489-494

出版商

Elsevier BV

发表日期

2012-07-14

DOI

10.1016/j.sna.2012.07.002

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