Application of silane-free atmospheric-plasma silicon deposition to MEMS devices

标题
Application of silane-free atmospheric-plasma silicon deposition to MEMS devices
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 177, Issue -, Pages 105-109
出版商
Elsevier BV
发表日期
2011-10-28
DOI
10.1016/j.sna.2011.10.025

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