Development of a low frequency electrostatic comb-drive energy harvester compatible to SoC design by CMOS process

标题
Development of a low frequency electrostatic comb-drive energy harvester compatible to SoC design by CMOS process
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 167, Issue 1, Pages 70-76
出版商
Elsevier BV
发表日期
2010-08-08
DOI
10.1016/j.sna.2010.07.013

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