期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 158, 期 1, 页码 43-50出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2009.12.029
关键词
Fiber optic; High-resolution sensor; Long-range displacement sensor; Two dimensions measurement; Displacement strategies; Silicon grating microfabrication; Integration in mechanical systems
A fiber optic sensor for two-dimension linear displacement measurements is described. This sensor can have resolution and range in nanometer and millimeter scales, respectively. After validation of the sensor principle in one dimension, the displacement methods in two dimensions are described and the experimental measurements are realized by the use of the sensor and high precision actuators. The best and the worst displacement cases are realized with measured limits of resolution of 27.4 nm and 38.7 nm in the range of 8.67 mm and 13.03 mm, respectively. (C) 2009 Elsevier B.V. All rights reserved.
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