Piezoelectric unimorph valve assembled on an LTCC substrate

标题
Piezoelectric unimorph valve assembled on an LTCC substrate
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 149, Issue 2, Pages 315-319
出版商
Elsevier BV
发表日期
2008-12-12
DOI
10.1016/j.sna.2008.11.025

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