Design and fabrication of MEMS thermoelectric generators with high temperature efficiency

标题
Design and fabrication of MEMS thermoelectric generators with high temperature efficiency
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 145-146, Issue -, Pages 423-429
出版商
Elsevier BV
发表日期
2007-12-07
DOI
10.1016/j.sna.2007.11.032

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