Design, fabrication, and experimental characterization of a flap valve IPMC micropump with a flexibly supported diaphragm

标题
Design, fabrication, and experimental characterization of a flap valve IPMC micropump with a flexibly supported diaphragm
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 141, Issue 2, Pages 640-648
出版商
Elsevier BV
发表日期
2007-11-27
DOI
10.1016/j.sna.2007.09.017

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