Article
Engineering, Electrical & Electronic
Rakesh Tirupathi, Sougata Kumar Kar
Summary: This brief introduces a switched-capacitor based low offset differential output sensor interface for MEMS capacitive accelerometers, which employs an improved demodulation scheme to reduce zero-g offset. The interfacing ASIC is designed and fabricated using UMC 180 nm CMOS process technology, achieving a maximum sensitivity of 1.45 V/g with less than 2% non-linearity error, a zero-g offset less than 3 milli-g, and a noise floor of approximately 200 mu g/root Hz.
IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS II-EXPRESS BRIEFS
(2021)
Article
Chemistry, Physical
Xiang Tian, Wei Sheng, Zhanshe Guo, Weiwei Xing, Runze Tang
Summary: A comb-type capacitive accelerometer based on silicon carbide microstructure was investigated in this study, showing superior performance compared to conventional silicon-based sensors. It has the advantages of low weight, small volume, and low cross-coupling, with a higher natural frequency than silicon(111) accelerometers. The accelerometer's resistive force consists of viscous damping and elastic damping components, with viscous damping dominating at low frequency and elastic damping dominating at high frequency.
Article
Engineering, Electrical & Electronic
Peng Peng, Wu Zhou, Lun Li, Jiangbo He, Bei Peng, Huijun Yu, Xiaoping He
Summary: This study investigates the drift of MEMS accelerometers stored at room temperature for one year through finite-element analysis simulation and experiments. A comprehensive FEA model is established to simulate the deformation of the sensor package structure, and drift models for the scale factor and bias of the accelerometer are built. The simulation results are validated through testing and recording the outputs of packaged accelerometers. The findings provide meaningful guidance for the application of MEMS accelerometers.
IEEE SENSORS JOURNAL
(2023)
Article
Multidisciplinary Sciences
Ghada Ahmed Khouqeer, S. Suganthi, Nadyah Alanazi, Abdullah Alodhayb, Muthumareeswaran Muthuramamoorthy, Saravanan Pandiaraj
Summary: This paper presents a design of a MEMS capacitive comb accelerometer for seismology application, using the COMSOL Multiphysics platform. The seismic device has a larger frequency band compared to traditional geophones and seismographs. The study measures amplitudes and frequencies of vibrations and compares the results for perforated mass and solid proof mass. The displacement sensitivity and capacitive sensitivity of the accelerometer are calculated.
JOURNAL OF KING SAUD UNIVERSITY SCIENCE
(2023)
Article
Engineering, Electrical & Electronic
Semih Taniker, Vincenzo Costanza, Paolo Celli, Chiara Daraio
Summary: We propose the realization of capacitive temperature sensors based on the concept of displacement amplification. Our design utilizes high CTE metallic layers and a low CTE dielectric layer to achieve large out-of-plane displacements and capacitive changes as the temperature increases.
IEEE SENSORS JOURNAL
(2022)
Article
Chemistry, Analytical
Dunzhu Xia, Mohan Yao, Jinhui Li
Summary: This article introduces a tri-axis accelerometer with a digital readout circuit and communication system. The device consists of resonant accelerometers in the x and y-axis and a seesaw capacitive one in the z-axis. The measurement is based on FPGA and test results show low bias instability, cross-coupling error, and nonlinearity. This tri-axis digital accelerometer with serial ports is more valuable than previous works with large commercial instruments.
Article
Engineering, Electrical & Electronic
Valentina Zega, Luca Martinelli, Riccardo Casati, Emanuele Zappa, Giacomo Langfelder, Alfredo Cigada, Alberto Corigliano
Summary: This work presents the design, fabrication, and testing of the first uniaxial Ti6Al4V alloy accelerometer produced through 3D printing technology. Experimental results show good performance, high sensitivity, small size, and low cost, opening the way for future development of high-performance custom sensors.
IEEE SENSORS JOURNAL
(2021)
Article
Engineering, Electrical & Electronic
Meysam Daeichin, Ronald N. Miles, Shahrzad Towfighian
Summary: This study demonstrates the feasibility of obtaining electrical read-out data from a capacitive MEMS accelerometer with a repulsive electrode configuration, allowing for large-stroke vibrations of microstructures without the pull-in failure of conventional accelerometers. The MEMS device has high mechanical sensitivity, with the ability to use large bias voltages for enhanced resolution and tunable frequency range.
IEEE SENSORS JOURNAL
(2021)
Article
Engineering, Electrical & Electronic
Yu Zeng, Yafei Qin, Youpeng Yang, Xinyu Lu
Summary: This work presents a flexible capacitive pressure sensor with low cost, excellent performance, and promising applications. The sensor features a simple preparation method, inexpensive materials, fast response, high sensitivity, wide operating range, and stability.
IEEE SENSORS JOURNAL
(2022)
Article
Chemistry, Physical
Sara Rachel Arussy Ruth, Vivian Rachel Feig, Min-gu Kim, Yasser Khan, Jason Khoi Phong, Zhenan Bao
Summary: To mimic human touch sensing, robotics require leveraging multiple sensory inputs. A new design has been created for a multifunctional capacitive pressure sensor with proximity-sensing capabilities, which can strongly sense pressure in contact mode as an equivalent parallel plate capacitive sensor of the same size.
Article
Chemistry, Analytical
Chenggang Wang, Yongcun Hao, Zheng Sun, Luhan Zu, Weizheng Yuan, Honglong Chang
Summary: This paper proposes a method of lowering the stiffness of capacitive-based microelectromechanical systems (MEMS) sensors by using softened beams achieved through electrostatic assembly. The experiments demonstrate that the stiffness of the accelerometer is reduced by 43% and the sensitivity is increased by 72.6% with the softened beams. The result is a significant reduction in noise and bias instability of the accelerometer. The technique of electrostatic assembly-based stiffness softening is proven to be effective and applicable to various types of MEMS devices.
Article
Chemistry, Analytical
Xianshan Dong, Yun Huang, Ping Lai, Qinwen Huang, Wei Su, Shiyuan Li, Wei Xu
Summary: A method for decomposing offset in a MEMS capacitive accelerometer was proposed in the study, which quantitatively analyzed the compositions of the offset and conducted experimental verification. The results indicated that by decomposing the offset, the major source could be identified, providing valuable insights for reducing offset and enhancing accelerometer performance.
Article
Engineering, Electrical & Electronic
Cuong Do, Ashwin A. Seshia
Summary: Temperature compensation is crucial for MEMS sensors, and a new active method based on a 2-D capacitive structure design is proposed in this work. The method consumes zero-power and achieves a gauge factor of 7, with a capacitance variation of 1 ppm/degrees C compared to conventional designs. This approach shows promise for low-power temperature-compensated sensors in battery-powered or energy-harvesting applications.
IEEE SENSORS JOURNAL
(2021)
Article
Engineering, Electrical & Electronic
Xueyang Liu, Chuanliang Li, Zhentao Wang, Yifeng Li, Jianqiu Huang, Huiyang Yu
Summary: This paper presents flexible pressure sensors based on 3D printing technology, with a sandwich structure design and a hollow prism structure pressure sensitive layer. Experimental synthesis of three kinds of flexible composite dielectrics demonstrated that the sensor with PDMS doping both BaTiO3 and CNTs showed the highest sensitivity, 1.3 times that of the reference sensor, indicating that fabricating composite dielectrics in this way has the potential to improve device performance.
IEEE SENSORS JOURNAL
(2021)
Article
Engineering, Electrical & Electronic
Mahsa Pournia, Mohammadreza Kolahdouz, Morteza Fathipour, Hesam Zare Zadegan
Summary: In this study, an empirical model was developed to predict the impact of substrate resistivity on MEMS capacitive accelerometer parameters, including rest capacitance, offset, output noise and scale factor. A stability analysis was also conducted to analyze the influence of substrate doping concentration on the performance of MEMS capacitive accelerometers. The experimental results showed a good agreement with the model predictions.
SENSORS AND ACTUATORS A-PHYSICAL
(2023)
Article
Engineering, Electrical & Electronic
Kehao Feng, Zhenghua Zhang, Guohua Bai, Xiuyuan Fan, Rongzhi Zhao, Xuefeng Zhang
Summary: This paper proposes a new method to accurately evaluate the high-frequency power loss of soft magnetic materials. Through a two-step calibration, the system is able to compensate for the phase angle discrepancy between the exciting current and induced voltage, enabling a higher power loss measurement frequency.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Mingfang Kang, Tong Liu, Hongmei Sun, Lin Li, Keliang Wang
Summary: In this study, the absorption performance of ambient nitrogenous toxic gases on a monolayer of blue phosphorus phase germanium selenide (GeSe) was investigated using density-functional theory calculations. The results showed that GeSe monolayer exhibits higher sensitivity and selectivity for the hazardous gas NO.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Yaqiong Niu, Zhicheng Zou, Longsheng Cheng, Chaofeng Ye
Summary: This paper proposes a novel method to stabilize the laser diode output using a close-loop control with two feedbacks. The proposed method performs better for long-time operations.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Jiajie Li, Ying Liu, Zhen Chai, Qian Cao, Renjie Li, Yueyang Zhai
Summary: This study proposed an efficient and high-quality beam-splitting method based on a diffractive optical element, enabling multichannel SERF atomic magnetometers to achieve ultra-high consistency and sensitivity. It has significant applications in array biomagnetic measurement systems.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
E. Oliveira, C. Doering, H. Fouckhardt
Summary: With the development of Lab on a chip technology, fluid management using dispersed droplets has become an important approach. Electrowetting on dielectric (EWOD) is one method for droplet actuation, but it requires prior definition of droplet positions. Optoelectrowetting (OEW) goes further by allowing changes in electrical parameters through impinging light spots, without the need for predefined droplet positions. This study re-evaluates the key parameters of OEW and explores their effects on droplet actuation using numerical optimization methods.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Haipeng Wang, Zhiguo Wang, Gancheng Zhu, Shuai Zhang
Summary: A novel capacitive proximity skin was developed to improve the performance of robotics in handling liquid-filled containers. This skin features a flexible structure that can adapt to different grippers and seamlessly integrate with Robot Operating System. Experimental results demonstrated that this proximity skin achieved data-lossless detection and contactless measurement of liquid level, making it suitable for grasping operations.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Tsenguun Byambadorj, Xiangyu Zhao, Yutao Qin, Yogesh B. Gianchandani
Summary: In this research, a monolithically microfabricated Knudsen pump (KP) without suspended membranes was presented. These pumps offer improved mechanical robustness, wider process window, and simplified microfabrication process compared to previous designs. The experimental results matched the modeling results well, indicating the potential for monolithic integration onto complex lab-on-a-chip systems.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Hamed Karami, Saeed Karami Chemeh, Vahid Azizi, Hooman Sharifnasab, Jose Ramos, Mohammed Kamruzzaman
Summary: Aroma is a significant quality trait for pharmaceutical plants and their products, indicating the quality of the raw material. An electronic nose is an efficient approach for identifying and evaluating the aroma of essential oils. In this study, tarragon was dried at different temperatures and air velocities, and the purity of tarragon essential oil was evaluated using an electronic nose. Multivariate data analysis and artificial neural networks modeling were employed to quantify and classify the obtained essential oils.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Xiaoyang Duan, Dan Xu, Wenjun Jia, Ran Li, Bohao Sun, Ruitian Yan, Wenjie Zhao
Summary: Flower-like WO3/WS2 heterojunction materials constructed via a low-temperature in-situ oxidation method exhibit significant improvements in the detection of NO2 gas in gas sensors, along with good selectivity and reproducibility.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Peng Yu, Mengyang Zhang, Manqi You, Yuxi Gao, Landong Xiao, Yan Peng, Jingxia Lai, Zhouzhao Shi, Siwei Luo, Gencai Guo, Gang Guo
Summary: Recent studies have shown that two-dimensional Janus transition metal dichalcogenides (TMDs) have great potential for applications in gas sensors. By conducting first principles calculations, this study explores the potential application of Pd-doped monolayer HfSeS as gas sensor materials for detecting CO, CO2, NH3, and NO. The results demonstrate the good thermodynamical stability and reversible adsorption of these molecules on both pristine and Pd-doped HfSeS, with Pd-doped HfSeS showing higher sensitivity towards NO due to its metallic behavior upon NO adsorption.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Jinlan Yang, Linjiao Li, Jun Huang, Quan Zhang, Hiba Affane
Summary: This study proposes a method for large-scale aggregation of micro-particles by creating a vortex region using low-frequency oscillation. Experimental results show that this method can achieve a large aggregation area and has the advantages of low cost and low power consumption.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Jitendra Singh, Saurabh Kumar Gupta, Vinita
Summary: In this investigation, a Surface Acoustic Wave (SAW) formalin gas sensor was explored for low-level formalin gas sensing applications. The sensor showed stable response and high sensitivity to formalin gas concentration, making it a reliable and useful sensor for room temperature operations.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Junyao Wang, Yahao Liu, Huan Liu, Qi Hou, Jianxin Xu, Hongxu Pan, Jingran Quan, Yansong Chen, Hanbo Yang, Lixiang Li
Summary: A flexible electrode with a serpentine-shaped tetra-chiral structure was designed to improve the mechanical properties and prevent mechanical fracture of flexible electrodes. The research demonstrated that this structure reduced the maximum tensile stress by 87.19% compared to the existing tetra-chiral structure. The flexible electrode remained conductive even at a strain of 70% and showed resistance values of 5 ohm and 4.4 ohm at a bending angle of 180 degrees and after 1000 fold cycles. Furthermore, the flexible electrodes showed great potential in biological signal monitoring, particularly in collecting ECG and pulse signals.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Taihao Chen, Yong Fang, Mengru Zhu, Zhiwei Zhao, Wei Lei, Zhuoya Zhu, Helong Jiang
Summary: Flexible dual-spectral carbon nanodots/flexible n-silicon heterojunction photodetectors with high responsivity and detectivity are reported. These detectors show photo response in UV illumination and only in forward bias under visible illumination. The photocurrent of the device remains high even under bending strain.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
M. S. Sikandar Bathusha, Israr Ud Din, Rehan Umer, Kamran A. Khan
Summary: Graphene-based nanomaterials are used as embedded sensors to monitor fracture behavior in composite structures. This study investigates the in-situ crack propagation and fracture behavior in a glass fiber reinforced polymer composite using embedded reduced graphene oxide coated fabrics and highly conductive graphene nanoplatelet paper.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)