Multi-domain simulation using VHDL-AMS for distributed MEMS in functional environment: Case of a 2D air-jet micromanipulator

标题
Multi-domain simulation using VHDL-AMS for distributed MEMS in functional environment: Case of a 2D air-jet micromanipulator
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 148, Issue 1, Pages 224-238
出版商
Elsevier BV
发表日期
2008-08-14
DOI
10.1016/j.sna.2008.07.025

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