CMOS integrated tactile sensor array by porous Si bulk micromachining

标题
CMOS integrated tactile sensor array by porous Si bulk micromachining
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 142, Issue 1, Pages 192-195
出版商
Elsevier BV
发表日期
2007-08-07
DOI
10.1016/j.sna.2007.08.003

向作者/读者发起求助以获取更多资源

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now