A Finite Element Model of a MEMS-based Surface Acoustic Wave Hydrogen Sensor

标题
A Finite Element Model of a MEMS-based Surface Acoustic Wave Hydrogen Sensor
作者
关键词
-
出版物
SENSORS
Volume 10, Issue 2, Pages 1232-1250
出版商
MDPI AG
发表日期
2010-02-03
DOI
10.3390/s100201232

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