Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy

出版年份 2010 全文链接

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作者

关键词

出版物

Volume 10, Issue 4, Pages 2675-2693

出版商

MDPI AG

发表日期

2010-03-26

DOI

10.3390/s100402675

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