Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs

标题
Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs
作者
关键词
-
出版物
SENSORS
Volume 9, Issue 4, Pages 2389-2414
出版商
MDPI AG
发表日期
2009-04-01
DOI
10.3390/s90402389

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