A MEMS-based Benzene Gas Sensor with a Self-heating WO3 Sensing Layer

标题
A MEMS-based Benzene Gas Sensor with a Self-heating WO3 Sensing Layer
作者
关键词
-
出版物
SENSORS
Volume 9, Issue 4, Pages 2895-2906
出版商
MDPI AG
发表日期
2009-04-21
DOI
10.3390/s90402895

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