Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process

标题
Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process
作者
关键词
-
出版物
SENSORS
Volume 9, Issue 11, Pages 8748-8760
出版商
MDPI AG
发表日期
2009-10-30
DOI
10.3390/s91108748

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