Mechanisms of defect formation in ingots of 4H silicon carbide polytype

标题
Mechanisms of defect formation in ingots of 4H silicon carbide polytype
作者
关键词
-
出版物
SEMICONDUCTORS
Volume 45, Issue 3, Pages 277-283
出版商
Pleiades Publishing Ltd
发表日期
2011-04-14
DOI
10.1134/s1063782611030055

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