Investigation of the effect of oxygen gas on properties of GAZO thin films fabricated by facing targets sputtering system

标题
Investigation of the effect of oxygen gas on properties of GAZO thin films fabricated by facing targets sputtering system
作者
关键词
-
出版物
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 29, Issue 7, Pages 075007
出版商
IOP Publishing
发表日期
2014-04-28
DOI
10.1088/0268-1242/29/7/075007

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