Silicon passivation and tunneling contact formation by atomic layer deposited Al2O3/ZnO stacks

标题
Silicon passivation and tunneling contact formation by atomic layer deposited Al2O3/ZnO stacks
作者
关键词
-
出版物
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 28, Issue 8, Pages 082002
出版商
IOP Publishing
发表日期
2013-06-11
DOI
10.1088/0268-1242/28/8/082002

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