Imaging and counting threading dislocations in c-oriented epitaxial GaN layers

标题
Imaging and counting threading dislocations in c-oriented epitaxial GaN layers
作者
关键词
-
出版物
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 28, Issue 3, Pages 035006
出版商
IOP Publishing
发表日期
2013-02-05
DOI
10.1088/0268-1242/28/3/035006

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