Strain mapping for the semiconductor industry by dark-field electron holography and nanobeam electron diffraction with nm resolution

标题
Strain mapping for the semiconductor industry by dark-field electron holography and nanobeam electron diffraction with nm resolution
作者
关键词
-
出版物
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 25, Issue 9, Pages 095012
出版商
IOP Publishing
发表日期
2010-08-24
DOI
10.1088/0268-1242/25/9/095012

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