A metal/Al2O3/ZrO2/SiO2/Si (MAZOS) structure for high-performance non-volatile memory application

标题
A metal/Al2O3/ZrO2/SiO2/Si (MAZOS) structure for high-performance non-volatile memory application
作者
关键词
-
出版物
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 25, Issue 5, Pages 055013
出版商
IOP Publishing
发表日期
2010-04-21
DOI
10.1088/0268-1242/25/5/055013

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