Characteristics of the ZnO thin film transistor by atomic layer deposition at various temperatures

出版年份 2009 全文链接

标题

Characteristics of the ZnO thin film transistor by atomic layer deposition at various temperatures

作者

关键词

-

出版物

SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Volume 24, Issue 3, Pages 035015

出版商

IOP Publishing

发表日期

2009-02-17

DOI

10.1088/0268-1242/24/3/035015

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