期刊
SCRIPTA MATERIALIA
卷 67, 期 9, 页码 748-751出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.scriptamat.2012.07.034
关键词
X-ray diffraction; Thin film; Mechanical properties; Microstructure
类别
资金
- FWF
- FFG within the project StressDesign
- FFG within the project PhaseStressEvolution
- Christian Doppler Association
- K2 Competence Centre in the framework of Austrian COMET Competence Centre Program
A novel synchrotron X-ray nanodiffraction approach for the quantitative characterization of strain and microstructure depth gradients in nanocrystalline thin films is introduced. Experiments were performed using monochromatic X-ray beams 100 and 250 nm in diameter on a 15 mu m thick CrN thin film. The results reveal a correlation between applied deposition conditions and a complex residual strain depth profile with a step-like shape and superimposed low-amplitude oscillations. Microstructure analysis shows multiple grain nucleation sites, smooth texture transitions and oscillating grain size distributions. (c) 2012 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
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